Measuring equipment - Import export

Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.

Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.

The IKO Linear Motor Table LT is a compact and highprecision positioning table made of aluminum alloy, with an optical linear encoder built in and an AC linear servomotor incorporated between moving table and bed. Three series (Compact Series LT···CE, Long Stroke Series LT···LD and High Thrust Series LT···H) are available and can be selected according to the application. The lightweight moving table and large thrust force of Linear Motor Table LT enables operation with high acceleration/deceleration and high response. Further, the advanced servo technology achieves high static stability and speed stability. Linear Motor Table LT is ideal for applications such as semiconductors and liquid crystal related equipment, measuring instruments, assemblers and conveying machines that require highspeed work.