Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.
Netherlands
The IKO Alignment Module AM is a positioning module developed for alignment stages by combining high rigidity Crossed Roller Bearings and Linear Way E with Precision Positioning Table TU. Alignment stages can be configured without adjusting the height of each alignment module, since the height tolerance is managed with high accuracy of ±10 μm.
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TU Series is a compact and slim type positioning table, consisting of a Ushaped track rail and a slide table. The slide table assembled inside the Ushaped track rail is an integral part of a linear motion rolling guide mechanism, in which two rows of large diameter steel balls are arranged in four point contact with raceways. Owing to this design, stable high accuracy and high rigidity are obtained in operations even under fluctuating load varying in direction and magnitude and complex load. Also, by adopting a Ushaped track rail, the rigidity of track rail under moment load and torsion is greatly improved. TU Series includes six sizes with a track rail width of 25 mm to 130 mm. For each of them, slide table length can be selected. Also, ball screw types and leads, motor types, and sensor installations, etc. can be selected to obtain an optimum positioning table suitable for each application.
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Precision Positioning Table LH is a highreliability, highprecision and highrigidity positioning table made of a cast iron slide table and bed with high rigidity and excellent vibration damping performance, incorporating an IKO Linear Way and using a precision ball screw for the feeding mechanism. By incorporating two Linear Ways in parallel, it achieves stable running accuracy, high positioning accuracy and large carrying mass. It is available in four sizes ranging from 120 mm to superlarge 420 mm in table width, and tables combining these in a twoaxis specification have also been serialized. It is optimum as a highprecision positioning mechanism for usage where the applied load is large and the stroke length relatively long.
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Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.
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