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Some variants of the QMG 700 will be discontinued Jan 31, 2018 Exceeding Detection Limits with Superior Stability and Refined Resolution Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability. Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for...

FAST, FIELD-READY PROCESS MONITORING SYSTEM Performance, Reliability, and Versatility INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch. Transpector CPM 3 provides proven return on investment to our partners through: 1 Ion source pressure reading @ low emission using total pressure lens 2 Total pressure accuracy @ low emission 3 Maximum ion source operating pressure @ low emission 4 2x10 -4 Torr in the ion source will produce about 1x10 -5 Torr in the quadrupole region 5 MDPP at the ion source with EM on and 1s dwell time 6 Mass 40 contribution onto 41 AMU 7 Zero blast...

THE STANDARD IN GAS ANALYSIS Excellent Performance and Great Value for General Vacuum Applications As manufacturing technologies advance and quality standards change, the need to understand your process and maintain product quality is more important than ever. Transpector MPS can help you optimize your process by monitoring process conditions, detecting contaminants, and checking for leaks. Transpector MPS offers the robust performance of the Transpector brand of RGA at an excellent value for our customers. Transpector MPS is available in both 100 amu and 200 amu versions, which gives you the flexibility of performing a wide variety of functions including general leak detection, vacuum diagnostics, and hydrocarbon analysis. This versatility makes Transpector MPS the sensor of choice for vacuum furnace, heat treating, and vacuum coating applications. (1) at 10% of peak height (2) during an eight hour period, after a half hour warm up; in FC mode only (3) 256 millisecond dwell time

UNLOCK YOUR PROCESS Unparalleled Performance for Increased Yields and Maximum Uptime The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market. INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the...

Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...

You can select form three types of FT150 series depending on the required sample applications. The standard spectrometer configuration allows you to analyse (as example): - electrical components, such as PCB, FPC, micro connector, lead frame etc. - chip component electrodes - general analytics for almost all other kind of samples and coating stacks. The types FT150 and FT150L enable especially the measurement of ultra thin coatings, such as Ni/Pd/Au from PCB connectors by polycapillary optics and an improved high-sensitive 50mm2 SDD detector. Two sizes of sample chamber and stage can be selected to accommodate standard (FT150) or large samples (FT150L). The FT150h using the new poly-capillary system enables the precise investigation of Sn and Ni layers in ceramic chip components by a simultaneous measurement, which is very difficult using conventional capillary or collimator optics. All three configurations have in common that the use of polycapillary optics and a high throughput SDD

With this high-end spectrometer the advantages of a fast and precise 50mm2 SDD, a flexible and robust X-Ray excitation and a motorized XYZ-stage can be used to analyse a wide range of samples in fast, reliable and precise measurements. This includes for example (but not restricted to): - solids (like metal alloys, minerals, jewellery, electronic parts [PCB],…) - powders (minerals, ceramics, paint, soil,… ) in a corresponding holder - liquids (oils, solutions, paint, …) in a corresponding holder A Dual CCD camera system with wide view and high-magnification view enables a precise positioning of the sample easily from a big area to investigate exactly to region of interest you want to analyse. With the help of the optical system an easy navigation over the sample is possible and a laser-based auto-focus system ensures correct measurement position. Furthermore a second laser-system prevents collisions. The easy identification of areas containing targeted elements is possible by combi

The use of XRF techniques enables a non-destructive analysis of nearly all kind of samples with almost no pre-processing. Already this basic spectrometer configuration allows you to analyse: - solids (like metal alloys, minerals, jewellery, electronic parts [PCB],…) - powders (minerals, ceramics, paint, soil,… ) in a corresponding holder - liquids (oils, solutions, paint, …) in a corresponding holder with respect to the latest restricted materials guidelines (like RoHS, WEEE, etc.) but also in a more general way to estimate the composition in an element range from Al (13) to U (92). A CCD camera is used to position the sample that only the area of interest is measured – with the use of suitable collimators a minimum spot size of 1mm can be realized. To enhance the measurement speed and analytical performance (energy resolution) the EA1000VX is equipped with a state-of-the-art 50mm2 SDD detector (no liquid Nitrogen needed anymore). This hardware allows you to analyse film thickness