Plasma technology - Import export

Cassette to cassette production tools PlasmaPro 100 Cobra clustered using 7 way robotic handler 200mm & multiwafer batch process modules & tool platforms offering excellent uniformity & high throughput on a range of applications. as stand-alone or cluster systems. Platforms may be clustered to combine technologies and processes with either cassette or single wafer loading options. Hexagonal or square transfer chamber configurations are available. ** Click to request pricing **