Systems for the semiconductor industry - Import export

FAST, FIELD-READY PROCESS MONITORING SYSTEM Performance, Reliability, and Versatility INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch. Transpector CPM 3 provides proven return on investment to our partners through: 1 Ion source pressure reading @ low emission using total pressure lens 2 Total pressure accuracy @ low emission 3 Maximum ion source operating pressure @ low emission 4 2x10 -4 Torr in the ion source will produce about 1x10 -5 Torr in the quadrupole region 5 MDPP at the ion source with EM on and 1s dwell time 6 Mass 40 contribution onto 41 AMU 7 Zero blast...