Semiconductor equipment - Import export

Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.

The IKO Linear Motor Table LT is a compact and highprecision positioning table made of aluminum alloy, with an optical linear encoder built in and an AC linear servomotor incorporated between moving table and bed. Three series (Compact Series LT···CE, Long Stroke Series LT···LD and High Thrust Series LT···H) are available and can be selected according to the application. The lightweight moving table and large thrust force of Linear Motor Table LT enables operation with high acceleration/deceleration and high response. Further, the advanced servo technology achieves high static stability and speed stability. Linear Motor Table LT is ideal for applications such as semiconductors and liquid crystal related equipment, measuring instruments, assemblers and conveying machines that require highspeed work.

CLube Linear Ball Spline MAG incorporates CLube in the IKO Ball Spline G. MAG is used primarily in semiconductor/liquid crystal related manufacturing equipment where harsh operating conditions and high acceleration/deceleration are common. CLube provides longterm, maintenance free operation, and reduces the cost of the whole system by eliminating the oil supply mechanism and reducing the running cost and hours required for lubrication.

CLube Linear Roller Way Super MX incorporates CLube lubrication into the Linear Roller Way Super X. The same high performance can be achieved for applications requiring high load capacity and running accuracy such as machine tools and semiconductor/liquid crystal related manufacturing equipment, but with CLube, longterm, maintenancefree performance can also be realized. This reduces the cost of the whole system by reducing the running costs and the work hours required for lubrication.