Contactless wafer handling - Import export

The modular Waferhandling-System facilitates all possible handling processes of wafers. Loading and unloading, conveying, gripping, inspecting, sorting and singulating can be realized in one system. Our Ultrasonic Suspension Technology keeps the wafer on distance the whole time and therefore prevents micro-scratches and contamination. Features of the Modular Waferhandling-System: - Modular Design - Contactless transport - Customizable according to customer specifcations - Linking various processes in one system

3DMicromac‘s microCELL™ OTF meets cell manufacturers‘ demands for increasing the efficiency of PERC solar cells, by precise surface structuring, low operating costs and highest availability. The system is suitable to process mono and polycrystalline silicon solar cells. Laser processing on-the-fly and an innovative handling concept enable maximum throughput and yield in the mass production of crystalline solar cells. The contactless cell handling enables processing without surface defects or microcracks. On-the-fly laser processing with unbeatable cost benefit ratio Contactless wafer handling High throughput and efficiency (> 3.800 wph) Low cost of ownership and CAPEX Upgrade for existing production lines or expansion

With the LeviWafer-Gripper Transport system it is possible, to lift and transport sensitive Wafers contactless. In combination with the transport, (un)loading of stacks and cassettes is also possible. The gripper uses ultrasonic bearing technology to keep the wafer at a distance, thus enabling contactless transport. In addition to micro-scratches and -cracks, contamination by particles is avoided since without compressed air no air turbulence is created. Therefore, the gripper is also very suitable for clean rooms. The LeviWafer-Gripper can be designed with a single or double paddle. Features of the LeviWafer-Gripper: - Contactless pickup - No micro-scratches, micro-cracks, or particles - Suitable for standard cassettes - Low energy consumption - Customizable according to customer specifications

With the Levi RollToRoll-Transport Lines it is possible to lift, redirect and transport sensitive and flexible glass, foils and packaging. Our technology generates a thin air film between the substrate and the surface of the roll, which allows the contactless roll-to-roll transport of workpieces. Therefore, micro-scratches and contamination can be prevented. The application can be delivered in different versions. For example, combinations with the UltraLevi-Desk for contactless transport are possible. The system also allows the inspection of substrates. Features of the LeviRoll: - Contactless transport - Different lengths available - Adjustable web tension - Customizable according to customer specifications, for example with inspection systems

With the UltraLevi-Desk it is possible to transport and (un)load substrates without contact. Our patented technology makes the workpieces float on the surface of the ultrasonic table. The substrate is kept at a distance, which prevents micro-scratches and other damage. By avoiding compressed air and thus air turbulence, particle contamination can also be prevented. Furthermore, high flatness of the substrate is guaranteed, also for flexible materials. The UltraLevi-Desk can be combined with other systems and can be realized with or without additional drive. Features of the UltraLevi-Desk: - No damage or particles - High Flatness of the substrate - Extendable - Recesses for inspection systems or cutting units - Customizable according to customer specifications

The LeviSolar-Gripper enables contactless gripping and depositing of solar wafers. Our technology guarantees the ultragentle and ultra-clean handling of the sensitive surfaces. When gripping the wafer, a combination of vacuum and ultrasound is used. The vacuum provides the attraction of the wafer and the ultrasound keeps the workpiece, with its repelling effect, at distance. Thus, no points of contact occur between the wafer and the gripper, and gentle handling is ensured. The LeviSolar-Gripper is available for different wafer sizes. The edge stops support the wafer to center itself and to stay in position. Features of the LeviSolar-Gripper: - Contactless overhead lifting - No carry-over of impurities and no micro scratches - No need for compressed air