Vacuum chambers - Import export

The Vacuum Chamber VC P305X300 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 370 mm, 620 mm) Width: 305 mm Height: 300 mm Front panel (optional): 9 U (1 U = 44.45 mm) Connections 1 x KF 16 5 x KF 40 Additional flanges possible in any position

Specially developed for use under high vacuum, our vacuum chamber VC P400x400 HV is made of a unique, flexible chamber system based on extruded aluminium profiles. The three-metre long profiles are cut to the required length and fitted with a screwed rear wall, as well as a door. Unlike our standard VC P400x400, the VC P 400x400 HV has no slots in the side walls. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 625 mm) Width: 400 mm Height: 400 mm Connections 1 x KF 16 6 x KF 40 Additional flanges possible in any position

The VC M600² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 600 mm Height: 600 mm Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position

The Vacuum Chamber VC P700D is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 1000 mm, 1400 mm) Inner diameter: 640 Ø Outer diameter: 700 Ø Front panel (optional): 18 U (1 U = 44.45 mm) Connections 2 x KF 16 2 x KF 40 2 x ISO K 63 Additional flanges possible in any position

The Vacuum Chamber VC P400x400 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 625 mm) Width: 400 mm Height: 400 mm Front panel (optional): 10 U (1 U = 44.45 mm) Connections 1 x KF 16 6 x KF 40 Additional flanges possible in any position

Vacuum degassing / outgassing With the aid of vacuum outgassing, unpleasant tastes or odors can be degassed and thus rendered tasteless. Altitude simulation For aircraft transport, it is essential to perform tests and simulations at a pressure <800 mbar, since in cargo holds, pressure equalization takes place, but cannot compensate for all fluctuations. Vacuum storage systems The safest way to store highly sensitive components is under vacuum. Under the vacuum environment, your components are protected from all external influences. Control and process control Our specially developed control program offers not only the possibility to monitor, but also to program and store various process sequences. High and ultra-high vacuum From the pressure range of rough vacuum to fine vacuum and ultra-high vacuum, we are able to meet your process requirements with our systems.

The VC M1200² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 1200 mm Height: 1200 mm Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position

The VC M1000² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 1000 mm Height: 1000 mm Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position

The VC M800² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. This system has great benefits: ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Colour of your choice possible by anodising ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ No welding required, parts can be easily attached Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 800 mm Height: 800 mm Volume approx. 640 liters Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position Door Hinged door with sight glass

The Vacuum Chamber VC P400X600 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 625 mm) Width: 400 mm Height: 600 mm Front panel (optional): 16 U (1 U = 44.45 mm) Connections 1 x KF 16 7 x KF 40 Additional flanges possible in any position

The Vacuum Chamber VC P240X240 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 420 mm, 600 mm) Width: 240 mm Height: 240 mm Front panel (optional): 8 U (1 U = 44.45 mm) Connections 2 x KF 16 3 x KF 40 Additional flanges possible in any position

The Vacuum Chamber VC P572X125 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 300 mm, 650 mm) Width: 572 mm Height: 125 mm Connections 1 x KF 16 4 x KF 40 Additional flanges possible in any position

The Vacuum Chamber VC P110x120 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 300 mm, 600 mm) Width: 110 mm Height: 120 mm Front panel (optional): 5 U (1 U = 44.45 mm) Connections 3 x KF 16 Zusätzliche Flansche in beliebiger Position möglich

The Vacuum Chamber VC P150x160 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 325 mm, 600 mm) Width: 150 mm Height: 160 mm Front panel (optional): 6 U (1 U = 44.45 mm) Connections 4 x KF 16 1 x KF 40 Additional flanges possible in any position

INFICON offers economical priced ISO-KF flange feedthroughs which can be found in all standard vacuum applications all over the world for many years. In addition to this feedthroughs a choice of connectors for vacuum and atmosphere side of vacuum chamber is configured. For UHV applications CF flanged feedthroughs are available in different sizes and technical specifications.

INFICON offers economical priced ISO-KF flange feedthroughs which can be found in all standard vacuum applications all over the world for many years. In addition to this feedthroughs a choice of connectors for vacuum and atmosphere side of vacuum chamber is configured. For UHV applications CF flanged feedthroughs are available in different sizes and technical specifications.

INFICON offers economical priced ISO-KF flange feedthroughs which can be found in all standard vacuum applications all over the world for many years. In addition to this feedthroughs a choice of connectors for vacuum and atmosphere side of vacuum chamber is configured. For UHV applications CF flanged feedthroughs are available in different sizes and technical specifications.

Preformed silicone heaters are useful for diamters as small as 12 mm and up to 100 mm. Rounded silicone heaters are not possible with self-adhesive foil. Spiral Wrap Pre-Formed Silicone Rubber Heaters are suitable for tubes and flexible pipes and hoses with Ø 6,35 mm (1/4"). Spiral formed flex heaters can be used up to Ø 12 mm (the length of the stretchable silicone spiral wrap heater is reduced accordingly). The thickness of our spiral-wrapped silicone strip heaters is 2,2 mm. Also our gas and pump line heaters, most frequently used in the semi-conductor process, are shaped and pre-formed according to the object geometry to be heated. They are designed to regulate temperatures in order to prevent condensation in the line. Current applications here are Semi Conductors, Vacuum Chambers, Wafer Chucks, Valves, Exhaust & Pump Systems.

In general, a Kapton film heater is always more expensive than a silicone heater or polyester heater. Where chemical resistance or the weight of the flexible heating element plays an important role, however, Kapton heaters are the ideal solution. The resistance of Kapton Polyimide to fungi, bacteria, ozone, weather, ageing and most chemicals, acids and solvents is very good, so that heating elements made of Polyimide (Kapton) are an ideal solution for many critical applications. Kapton foil heaters are also silicone-free and are characterised by an even heat distribution. The dielectric strength of a Polyimide film is very high and so the flexible Kapton (Polyimide) heater can be very thin. Due to the small thickness, the heat transfer to the component is improved and higher surface loads are possible. Typical applications for Kapton film heaters are: Laboratory technology, aircraft electronics, printers, diagnostic instruments, vacuum chambers, medical equipment and many more.

The vacuum packgaing machine AZ450ES from AIRZERO is working with a suction nozzle compared to vacuum chamber machines. The main advantages are Since only the bag and not the entire chamber is emptied, the process is faster. Lower gas consumption when gassing (only the bag is gassed and not the entire chamber). The gas is blown into the bag in a targeted and controlled manner. No limitation of the bag length by the chamber. Bar goods can therefore also be processed. Compact standalone device. double sealing (up/down) ejektorvakuum pump (air pressure required) gas flushing vacuum creation timer controlled, sensor controlled digital vakuum display 4 programms can be saved housing of stainless steel suitable for cleanroom

The Mini Water Vac is a designated oil purification unit which can be applied directly to various types of machine reservoirs. It dehydrates and cleans most types of oils such as lubricating, hydraulic, transformer, and switch oils. The Mini Water Vac is a self-regulating filtration unit which removes particles, gas, and water. The purified oil satisfies the most stringent quality requirements. Motor/Pump Units ▪ Different configurations available Optional Extra ▪ With water sensor Filter Elements ▪ Filter elements of SRM series Construction ▪ Vacuum Dehydration Unit for industrial applications Max. System Volume ▪ 3.000 l / 795 gal Recirculating Flow Rate ▪ 90 l/h / 23.8 gal/hr Materials ▪ Filter housing: Anodised Aluminium ▪ Vacuum chamber: Anodised Aluminium ▪ Heater chamber: Anodised Aluminium Removals ▪ 100% of free water, >80% of dissolved water ▪ 100% of free gases, >80% of dissolved gases

In contrast to chamber devices, the vacuum sealer AZ450 from AIRZERO works with a suction nozzle. This principle offers advantages Since only the bag and not the entire chamber is emptied, the process is faster. Lower gas consumption when gassing (only the bag is gassed and not the entire chamber). The gas is blown into the bag in a targeted and controlled manner. No limitation of the bag length by the chamber. Bar goods can therefore also be processed. Compact desktop device. double sealing (up/down) ejektor vakuum pump (air pressure required) gas flushing digital vakuum display 4 programms can be saved housing of stainless steel

The ZHN/SEM is a complete nanoindenter specifically designed for use in the confined spaces of the vacuum chamber of a scanning electron microscope (SEM).

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 100 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 100 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Femto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 2 to 3 litres of this plasma system offers enough space to serve laboratory and small series production. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 1440 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 1440 litres of this plasma system offers enough space to serve series production. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 45 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 45 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tretra 320R low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 320 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Atto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 10.5 litres of this plasma system offers enough space to serve laboratory and also small series production. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ...