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Dedicated Scanning Probe Microscope imaging, analysis and metrology software (SPM, AFM, STM, CSAFM, KPFM, MFM, NSOM, etc.) Compatible with all scanning probe microscope techniques for nano surface imaging and analysis. Real time 3D multi-channel imaging of SPM topography, phase, defection, current, auxiliary and other layers including overlays. High quality SPM imaging with powerful image optimization and enhancement tools. Intelligent SPM image artifact correction, scan line by line leveling, noise filtering. Comprehensive nano surface analysis including nano-geometry and roughness. Numerous optional modules including AFM force curve analysis and colocalization of SPM images with SEM and other images. Smart user interface for maximum ease of use combined with powerful automation features - including multiple topography image stitching - to accelerate analysis. Easy integration into research and lab environments including export of numerical data and images for easy post-processing and publication.