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Spare parts include for example chambers, filaments, arc slits, holders and many other parts. The pare parts are made of graphite, molybdenum, tungsten and alloys. They are extremely durable and long lasting and therefore save money and maintenance time. 100 or more Plansee components are at work in every beam path. They ensure that the ions are generated efficiently and guided precisely and free from impurities along the beam path to the wafer. For customers in the semiconductor industry, Plansee spare parts are increasingly becoming more than just spares. Taking the equipment manufacturer's original spare parts as starting point, Plansee optimizes the geometries and material compositions. The benefits to you: — Simplified component installation and removal — Longer service lives — Lower cleaning costs — Reduced maintenance work — Reduced downtimes
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Washers made of molybdenum are available in the Plansee Online Shop. Order fast and easily from the producer's online shop: www.plansee.com/shop
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Nuts made of molybdenum and the molybdenum alloy TZM are available in the Plansee Online Shop. Order fast and easily from the producer's online shop: www.plansee.com/shop
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Washers made of tungsten for high temperature furnaces are available in the Plansee Online Shop. Order fast and easily from the producer's online shop: www.plansee.com/shop Whether for annealing furnaces and soldering processes, coating systems, MIM furnaces, sintering furnaces, HIP processes or for growing single crystals: Whenever things get hot, we're here for you with our molybdenum, tungsten, tantalum and niobium. Find out more about our intrepid products for your Systems on our Website www.plansee.com. Is your product not yet on the list? That's not a problem. We'll be happy to find a tailor-made solution for you.
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