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MICROMEGA DYNAMICS S.A.
Belgium
Do you have highly precise and very sensitive equipment, such as a microscope, an inspection device, an imaging system or a polishing machine and is the use of an active or passive isolation platform , insufficient? It may be that local/global resonances are degrading the performance of the isolation system, because it is not stiff enough or because perturbation sources are located on the isolated part. In such a case, our Active Damping Devices provide a solution by introducing structural damping into most of the unwanted mechanical resonances. Up to 15% structural damping can be achieved, without any major redesign effort. Compared to passive dampers, the ADD are lighter and not sensitive to changes in the supporting structure dynamics.Structural vibration reduction of isolated machines for performance improvement (microlithography, microscope, chip manufacturing or inspection machines, etc.)
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