BS78 High-Resolution Interferometric Length Measurement System - with 138nm Signal Period

The BS78 is a highly accurate open length measurement system with interferometric signal generation in a through-light design. The scale has a division period of 0.55µm. Through the LASERSCALE functional principle, a sinusoidal measurement signal with a signal period of 138nm is generated. This has an extremely high signal quality with very low noise levels. As a result, resolutions of up to 2.1 pm can be achieved. Due to the extremely low interpolation error, the BS78 is perfectly suited for ultra-precision machining, measurement, and calibration applications. Measuring lengths: 10mm - 420mm Accuracy: +/-0.03µm to +/-0.65µm depending on the version Max. resolution: 2.1pm with BD700 Reference mark: one, selectable Scale material: Neoceran (-0.7x10^-6/°K) Output signals: 1Vpp, TTL, BISS-C, 40 bit binary Max. travel speed: 400mm/s Signal period: 138nm