PSG5xx Device for the Range of Atmospheric Pressure to
PSG5xx Device for the Range of Atmospheric Pressure to

PSG5xx Device for the Range of Atmospheric Pressure to

0 €
The extremely compact Pirani gauge provides very reliable measurements in the range of 5 E-4 mbar to atmosphere. The Pirani standard gauges PSG500, PSG502-S, PSG510-S, and PSG512-S from INFICON are equipped with the most advanced Pirani digital technology available on the market. The robust stainless steel sensor cell and compact design are ideal for use in semiconductor systems and for standard applications such as pre-vacuum lines. Features • Easy adjustment of ATM and HV via push buttons • Space-saving, robust design • Aluminum housing • Mounting in any position • Stainless steel measuring cell with metal-sealed feedthrough • Logarithmic signal output for easy integration • 10 bar absolute overpressure with threaded connections • Bakeable version at 250 °C • Optional version with nickel filament for corrosive applications • Ceramic feedthrough for extremely corrosive applications (PSG510 and PSG512)
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