Gas and pump line heaters - Trace heaters in order to prevent freezing or condensation in the line

Freek pump and gas line heaters for trace heating are designed to regulate temperatures in order to prevent freezing or condensation in the line. As with all our heaters, these can be designed and produced to your bespoke specifications. A most frequent application for gas & pump line heaters the semi-conductor process in which gases such as Tetraethyl Orthosilicate (TEOS), Boron Trichloride (BCl3), Aluminium Chloride (AlCl3), Chlorine Triuoride (ClF3) and Dichlorosilane (DCS) condense at low temperatures. Should this occur, it could result in wafer defect. Gas and pump line heaters consistently heat the lines and provide a simple heating solution and prevent condensation build up. The optimum line temperature will vary depending on the process.