Plasma Surface Treatment | Tetra 1440

Plasma surface treatment system, low pressure, plasma cleaning - Diener electronic's plasma installations have long been established in various industrial sectors. With the low-pressure plasma system Tetra 1440, you are investing in modern and sustainable cold vacuum plasma technology. The chamber volume of approximately 1440 liters in this plasma system provides ample space for series production. Low-pressure plasma treatment is a proven technique for controlled fine cleaning, adhesion enhancement (activation and etching), and thin film coating on substrate surfaces. The plasma is generated by applying a high-frequency voltage in the vacuum chamber. The treatment gas introduced into the chamber is then ionized. Application: - VOC-free cleaning of organic residues - Activation before painting, bonding, encapsulation, ... - Etching of PTFE, photoresist, oxide layers, ... - Super-hydrophobic and super-hydrophilic coatings Dimensions (floor-standing device): 2400 mm x 2130 mm x 2000 mm (LxHxP) - Pmax 3 m Vacuum chamber (material): Aluminum Vacuum chamber (dimensions): approx. 1200 mm x 1200 mm x 1000 mm (LxHxP) - Pmax 3 m Vacuum chamber (volume): approx. 1440 liters Vacuum chamber (closure): Hinged door, automatic door Gas supply: 1 - 4 Mass flow controllers (MFCs) Pressure measurement: Pirani, Capacitive manometer (for corrosive gas version) Generators: 80 kHz / 5000 W Electrodes: One or multiple levels Control systems: Full PC (Win.10 IoT) Power supply: 400 V / 50 - 60 Hz Vacuum pumps: One or multiple levels