Plasma Surface Treatment System | Tetra 45

Low-pressure plasma system, plasma surface treatment system, plasma cleaner - plasma systems from Diener electronic have long established themselves in various industrial sectors. With the low-pressure plasma system Tetra 45, you are opting for modern and future-proof cold plasma technology in a vacuum. The chamber volume of approximately 45 liters in this plasma system provides enough space to accommodate series production/automation. Plasma treatment in low-pressure plasma is a proven technique for controlled fine cleaning, improving adhesion (activation and etching), and coating thin layers on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber, where the introduced process gas is ionized. Application areas: - VOC-free cleaning of organic residues - Activation before painting, bonding, potting, … - Etching of PTFE, photoresist, oxide layers, … - Super-hydrophobic and -hydrophilic coatings Dimensions (stand-alone unit): 870 mm x 1700 mm x 1000 mm (WxHxD) Vacuum chamber material: Aluminum Vacuum chamber dimensions: approx. 572 mm x 125 mm x 650 mm (WxHxD) Vacuum chamber volume: approx. 45 liters Vacuum chamber closure: Hinged door, automatic door Gas supply: Mass Flow Controller (MFCs) Generator: 80 kHz; 100 kHz; 13.56 MHz; 2.45 GHz Pressure measurement: Pirani, capacitance manometer Electrodes: according to customer specifications Control: Basic PC (Win. CE), Full PC (Win. 10 IoT) Power supply: 400 V / 50 - 60 Hz Vacuum pump: according to customer specifications