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LogoAURION ANLAGENTECHNIK GMBH
Germany, Seligenstadt
232km
... plasma systems. This includes impedance matching networks with autotuning units, as well as filters, switches, phase shifters, power dividers, cables, and connectors. The focus is on high-frequency plasma processes at 13.56 or 27.12 MHz. Building on the know-how from component manufacturing, AURION also offers complete systems for plasma-assisted surface treatment, which means both for surface cleaning and modification as well as for coating and etching processes (PVD, PECVD, RIE, microwave).
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Portfolio (9)
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