Thin Film Deposition
STM-2XM
Description
SIMPLE OPERATION FOR MANY APPLICATIONS STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price. STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors. Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1). FEATURE PACKED STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments. Programmable features include shutter delay, time/power monitoring, and rate sampling. Use...
Product characteristics
- Compatible sensors
- Single/shuttered single or dual QCM sensor
- Sensor inputs
- Two
- Measurement frequency range
- 6.0 to 5.0 MHz (fixed)
- Frequency resolution
- ±0.03 MHz at 6 MHz
- Reference frequency stability
- ±2 ppm
- Thickness and rate resolution/measurement
- ±0.037 Å @ tooling/density = 100/1, fundamental frequency = 6 MHz
- Measurement interval
- 0.10 s
- Stored films
- 15
- Display mode
- Thickness/Mass
- Digital inputs
- Eight
- Digital outputs
- Eight
- Analog outputs
- Four
- Analog output rating
- 0 to +/-10 V, 10 mA
- Relay rating
- Up to 48 V (dc) • V (ac), 2A
- Power requirement
- 120/240, 50/60 Hz, 2.5 VA
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