Residual Gas Analyzers (RGA) and Mass Spectrometers

Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...

Some variants of the QMG 700 will be discontinued Jan 31, 2018 Exceeding Detection Limits with Superior Stability and Refined Resolution Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability. Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for...

THE STANDARD IN GAS ANALYSIS Excellent Performance and Great Value for General Vacuum Applications As manufacturing technologies advance and quality standards change, the need to understand your process and maintain product quality is more important than ever. Transpector MPS can help you optimize your process by monitoring process conditions, detecting contaminants, and checking for leaks. Transpector MPS offers the robust performance of the Transpector brand of RGA at an excellent value for our customers. Transpector MPS is available in both 100 amu and 200 amu versions, which gives you the flexibility of performing a wide variety of functions including general leak detection, vacuum diagnostics, and hydrocarbon analysis. This versatility makes Transpector MPS the sensor of choice for vacuum furnace, heat treating, and vacuum coating applications. (1) at 10% of peak height (2) during an eight hour period, after a half hour warm up; in FC mode only (3) 256 millisecond dwell time

UNLOCK YOUR PROCESS Unparalleled Performance for Increased Yields and Maximum Uptime The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market. INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the...