Interferometer 5400-th

The optoNCDT ILR2250-100 laser distance sensor is designed for precise distance measurements in industrial environments. A reflector attached to the measuring object enables distance measurements up to 150 m. Without reflector, the sensor detects measuring ranges up to 100 m. The integrated AUTO measurement mode enables reliable measurements even on dark, partly reflecting and remote measuring objects. Therefore, the ILR2250 sensors can be used for distance measurements on numerous surfaces.

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.

The new white light interferometer IMS5600-DS is used for distance measurements with highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, e.g., in electronics and semiconductor production.

The IMS5420 is a high-performance white light interferometer for non-contact thickness measurement of monocrystalline silicon wafers. The controller has a broadband superluminescent diode (SLED) with a wavelength range of 1,100 nm. This enables the thickness measurement of undoped, doped and highly doped SI wafers with only one measuring system. The IMS5420 achieves a signal stability of less than 1 nm. The thickness can be measured from a distance of 24 mm.