Fabwide, Process Specific FabGuard FDC combines on-line Fault Detection and Classification (FDC) capabilities with powerful tools for fab engineers to readily analyze virtually any aspect of process and equipment behavior. No other system provides greater capability to guard against wafer loss, reduce unscheduled tool downtime and improve yield. Regardless of wafer size or product geometry, timely information is key to fab productivity and competitiveness. The increasing pressure to reduce costs makes it critical to maximize fab productivity, reduce the number of scrapped wafers and maximize equipment utilization. FabGuard meets the challenges of today’s semiconductor manufacturing by combining the collective experience of statisticians and engineers tasked with maintaining cutting edge fab productivity. FabGuard FDC is built on the principle that process and equipment knowledge is crucial to smooth fab operations. Redefining FDC - FabGuard Detection and...
INFICON GMBH
Germany
Powerful Yet Compact Solutions for Deployment of FabGuard FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.
Request for a quoteCreate one request and get multiple quotes form verified suppliers.